Taping is often used to protect patterned wafers and reduce fragmentation during backgrinding of silicon wafers. Grinding experiments using coarse and fine resin-bond diamond grinding wheels were performed on silicon wafers with tapes of different thicknesses to investigate the effects of taping on peak-to-valley (PV), surface roughness, and subsurface damage of silicon wafers after grinding. Results showed that taping in backgrinding could provide effective protection for ground wafers from breakage. However, the PV value, surface roughness, and subsurface damage of silicon wafers with taping deteriorated compared with those without taping although the deterioration extents were very limited. The PV value of silicon wafers with taping decreased with increasing mesh size of the grinding wheel and the final thickness. The surface roughness and subsurface damage of silicon wafers with taping decreased with increasing mesh size of grinding wheel but was not affected by removal thickness. We hope the experimental finding could help fully understand the role of taping in backgrinding.

Zhigang DONG ,   Qian ZHANG   et al.
Functional performance variations of products and systems are often used to measure the qualities of products and systems considering the changes in the design parameter values caused by uncertainties. A robust design approach has been developed in this research to minimize the functional performance variations considering the design parameter uncertainties by identifying the boundaries of the functional performance variations through optimization. In this work, a mathematical model is developed to describe the relationships among functional performance, design configurations and parameters, and design parameter uncertainties. A multi-level optimization model is established to identify: (1) The optimal design configuration, (2) the optimal values of design parameters, and (3) the boundaries of functional performance variations. Sensitivity analysis considering the impact of parameter uncertainties on functional performance variation boundaries has also been conducted. A case study on the design of a truss system has been conducted. Case study results show that the sensitivities of functional performance variation boundaries to the design parameter uncertainties can be reduced significantly using the new robust design approach.

J. ZHANG ,   H. DU   et al.
Pilot two-stage proportional valves are widely used in high-power hydraulic systems. For the purpose of improving the dynamic performance, reliability, and digitization of the traditional proportional valve, a novel two-stage proportional valve with a pilot digital flow distribution is proposed from the viewpoint of the dual nozzle-flapper valve’s working principle. In particular, the dual nozzle-flapper is decoupled by two high-speed on/off valves (HSVs). First, the working principle and mathematical model of the proposed valve are determined. Then, the influences of the control parameters (duty cycle and switching frequency) and structural parameters (fixed orifice’s diameter and main valve’s spring) on the main valve’s motion are analyzed on the basis of theory, simulation, and experiment. In addition, in optimizing the value of the fixed orifice’s diameter, a new design criterion that considers the maximum pressure sensitivity, flow controllability, and flow linearization is proposed to improve the balance between the effective displacement and the displacement fluctuation of the main valve. The new scheme is verified by simulations and experiments. Experimental results of the closed-loop displacement tracking have demonstrated that the delay time of the main valve is always within 3.5 ms under different working conditions, and the tracking error can be significantly reduced using the higher switching frequency. The amplitude–frequency experiments indicate that a ?3 dB-frequency of the proposed valve can reach 9.5 Hz in the case of±50% full scale and 15 Hz in the case of 0%–50% full scale. The values can be further improved by increasing the flow rate of the pilot HSV.

Qiang GAO ,   Yuchuan ZHU   et al.
Practice experimentation that integrates the manufacturing processes and cutting-edge technologies of smart manufacturing (SM) is essential for future academic and applied engineering personnel. The broadening efficacy of hands-on experience in SM engineering education has been manifested. In this regard, a reference practical system is proposed in this study for hands-on training in SM crucial advancements. The system constructs a mobile robot-based production line (MRPL) to increase participants’ interest in theoretical learning and professional skills. The MRPL-based reference system includes the comprehensive principles and processes involved in modern SM factories from warehousing to logistics, processing, and testing. With key features of modularity, integrability, customizability, and open architecture, this system has a threefold objective. First, it is an interdisciplinary subject that enables students to translate classroom learning into authentic practices, thus facilitating knowledge synthesis and training involvements. Second, it offers effective support to cultivate the attributions and behavioral competencies of SM talents, such as perseverance, adaptability, and cooperation. Third, it promotes students’ capacities for critical thinking and problem solving so that they can deal with the difficulties that physical systems have and motivates them to pursue careers with new syllabi, functions, and process technologies. The received positive evaluations and assessments confirm that this MRPL-based reference system is beneficial for modern SM talent training in higher engineering education.

Shuting WANG ,   Liquan JIANG   et al.

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